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Wednesday, March 12, 2014, 02:00pm - 03:00pm


gary mayDr. Gary S. May

Dean & Professor, College of Engineering, Georgia Tech

Artificial Intelligence in Semiconductor Manufacturing

Abstract: The fabrication of semiconductor devices and integrated circuits continues to be a profitable, yet extremely expensive operation. Currently, semiconductor manufacturing has become so capital-intensive that only a few very large companies participate. A typical state-of-the-art, high-volume-manufacturing facility built to serve one or two generations of technology today costs about $3 billion dollars. The challenge before semiconductor manufacturers is to offset an extremely large capital investment with a greater amount of technological innovation, efficiency, and flexibility in the fabrication process, to use the latest developments in computer hardware and software technology to enhance the manufacturing methods to develop computer-integrated manufacturing of integrated circuits (IC-CIM).

The interdependent issues of high yield, high quality, and low cycle time have been addressed in part by the ongoing development of several critical capabilities in state-of-the-art IC-CIM systems: in-situ process monitoring, process/equipment modeling, real-time closed-loop process control, and equipment malfunction diagnosis. Each of these activities increases throughput and improves yield by preventing potential misprocessing, but each also presents significant engineering challenges in effective implementation and deployment. Although these techniques have traditionally relied on statistically-based methods in their implementation, for more than a decade, the Intelligent Semiconductor Manufacturing group at Georgia Tech has explored the feasibility of using artificial intelligence techniques as an alternative approach. This talk will provide a general overview of the potential value of such techniques in semiconductor manufacturing, with a particular emphasis on the areas listed above.

Bio: Dr. Gary S. May received his B.S. in Electrical Engineering from Georgia Tech in 1985 and his M.S./PhD in Electrical and Computer Engineering from the University of California at Berkeley in 1987 and 1992 respectively. Dean May joined the ECE faculty at Georgia Tech in 1991 as a member of the schools microelectronics group. He started his tenure as Dean of the College of Engineering on July 1, 2011.

Dean May's research focuses on computer aided manufacturing of integrated circuits. He was a National Science Foundation "National Young Investigator" (1993-98) and was Editor-in-Chief of IEEE Transactions on Semiconductor Manufacturing (1997-2001). He has authored over 200 articles and technical presentations in the area of IC computer-aided manufacturing. In 2001, he was named Motorola Foundation Professor.

Dean May is the founder of Georgia Tech's Summer Undergraduate Research in Engineering/Science (SURE) program, a summer research program designed to attract talented minority students into graduate school. He also is the founder and director of Facilitating Academic Careers in Engineering and Science program, a program designed to encourage minority engagement in engineering and science careers. He is a member of the National Advisory Board of the National Society of Black Engineers.

Hosted by: EECS Prof. Larry Henschen

Location FORD ITW Auditorium
Wednesday, March 12, 2014 at 02:00pm
Contact Lana Kiperman, (847) 467-0028,

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